目 錄
第1 章 光電探測(cè)技術(shù)基礎(chǔ)理論 ·····················································································.1
1.1 光電探測(cè)系統(tǒng)概述 ·································································································.1
1.2 輻射度學(xué)和光度學(xué) ·································································································.1
1.2.1 輻射度學(xué) ····································································································.1
1.2.2 光度學(xué) ·······································································································.3
1.2.3 輻射度學(xué)與光度學(xué)的基本定律 ·········································································.5
1.2.4 黑體輻射 ····································································································.7
1.3 半導(dǎo)體基礎(chǔ)知識(shí) ····································································································.9
1.3.1 半導(dǎo)體結(jié)構(gòu) ·································································································.9
1.3.2 半導(dǎo)體中的載流子濃度 ·················································································.12
1.4 半導(dǎo)體的光電效應(yīng) ································································································.16
1.4.1 光電導(dǎo)效應(yīng) ································································································.16
1.4.2 光伏效應(yīng) ···································································································.17
1.4.3 光電發(fā)射效應(yīng) ·····························································································.19
1.5 光熱效應(yīng) ············································································································.20
1.5.1 熱電偶和熱電堆 ··························································································.21
1.5.2 熱釋電探測(cè)器件 ··························································································.22
1.6 光電探測(cè)器件的噪聲和主要特性參數(shù) ········································································.25
1.6.1 光電探測(cè)器件的噪聲 ····················································································.25
1.6.2 光電探測(cè)器件的主要特性參數(shù) ········································································.27
思考與練習(xí) ···············································································································.29
第2 章 光電探測(cè)系統(tǒng)中的常用光源 ·············································································.30
2.1 光源的基本特性參數(shù) ·····························································································.30
2.1.1 輻射效率和發(fā)光效率 ····················································································.30
2.1.2 光譜功率分布 ·····························································································.31
2.1.3 空間發(fā)光強(qiáng)度分布 ·······················································································.31
2.1.4 光源的顏色 ································································································.32
2.1.5 光源的色溫 ································································································.32
2.2 熱輻射源 ············································································································.33
2.2.1 太陽(yáng)與黑體模擬器 ·······················································································.33
2.2.2 白熾燈與鹵鎢燈 ··························································································.34
2.3 氣體放電光源 ······································································································.34
2.4 發(fā)光二極管 ·········································································································.37
2.4.1 無(wú)機(jī)材料發(fā)光二極管 ····················································································.37
2.4.2 有機(jī)材料發(fā)光二極管 ····················································································.40
2.5 激光器 ···············································································································.43
2.5.1 激光器的基本原理 ·······················································································.43
2.5.2 激光器的分類(lèi)及應(yīng)用 ····················································································.44
2.5.3 激光的特性 ································································································.52
2.6 新型光源 ············································································································.53
2.6.1 ASE 光源 ··································································································.53
2.6.2 超連續(xù)譜光源 ·····························································································.54
思考與練習(xí) ···············································································································.55
第3 章 光電發(fā)射器件 ··································································································.57
3.1 光電陰極 ············································································································.57
3.1.1 光電陰極的主要特性參數(shù) ··············································································.57
3.1.2 常用光電陰極材料 ·······················································································.59
3.2 光電管與光電倍增管 ·····························································································.61
3.2.1 光電管的結(jié)構(gòu)及原理 ····················································································.61
3.2.2 光電倍增管的結(jié)構(gòu)及原理 ··············································································.61
3.2.3 微通道板光電倍增管的結(jié)構(gòu)及原理 ··································································.63
3.3 光電倍增管的主要特性參數(shù) ····················································································.66
3.4 光電倍增管的供電電路和信號(hào)輸出電路 ·····································································.70
3.4.1 供電電路 ···································································································.70
3.4.2 信號(hào)輸出電路 ·····························································································.73
3.5 像增強(qiáng)器 ············································································································.74
3.5.1 第一代像增強(qiáng)器 ··························································································.74
3.5.2 第二代像增強(qiáng)器 ··························································································.75
3.5.3 超二代像增強(qiáng)器 ··························································································.75
3.5.4 第三代及第四代像增強(qiáng)器 ··············································································.75
3.6 光電發(fā)射器件的應(yīng)用 ·····························································································.76
3.6.1 光電倍增管的典型應(yīng)用 ·················································································.76
3.6.2 像增強(qiáng)器的典型應(yīng)用 ····················································································.78
思考與練習(xí) ···············································································································.79
第4 章 光電導(dǎo)探測(cè)器件 ·······························································································.80
4.1 光電導(dǎo)探測(cè)器件的工作原理與結(jié)構(gòu)特點(diǎn) ·····································································.80
4.1.1 光電導(dǎo)原理 ································································································.80
4.1.2 光電導(dǎo)探測(cè)器件的結(jié)構(gòu)特點(diǎn) ···········································································.82
4.2 光電導(dǎo)探測(cè)器件材料及結(jié)構(gòu)特點(diǎn) ··············································································.83
4.3 光電導(dǎo)探測(cè)器件的主要特性參數(shù) ··············································································.85
4.3.1 光電流及光電導(dǎo)增益 ····················································································.85
4.3.2 光電特性 ···································································································.86
4.3.3 光譜特性 ···································································································.88
4.3.4 伏安特性 ···································································································.89
4.3.5 時(shí)間響應(yīng)及頻率特性 ····················································································.90
4.3.6 前歷效應(yīng) ···································································································.92
4.3.7 溫度特性 ···································································································.93
4.4 光電導(dǎo)探測(cè)器件的轉(zhuǎn)換電路 ····················································································.93
4.4.1 基本偏置電路 ·····························································································.93
4.4.2 恒流偏置電路 ·····························································································.94
4.4.3 恒壓偏置電路 ·····························································································.95
4.5 光電導(dǎo)探測(cè)器件的應(yīng)用實(shí)例 ····················································································.96
4.5.1 自動(dòng)調(diào)光臺(tái)燈控制電路 ·················································································.96
4.5.2 聲光控制延時(shí)電路 ·······················································································.97
4.5.3 火焰探測(cè)報(bào)警器 ··························································································.98
4.5.4 相機(jī)自動(dòng)曝光控制電路 ·················································································.99
4.5.5 熱電制冷型紅外測(cè)溫儀 ···············································································.100
思考與練習(xí) ·············································································································.101
第5 章 半導(dǎo)體結(jié)型光電器件 ······················································································.102
5.1 結(jié)型光電器件的基本原理 ·····················································································.102
5.1.1 熱平衡狀態(tài)下的PN 結(jié) ···············································································.102
5.1.2 光照下的PN 結(jié) ························································································.102
5.2 硅光電池 ··········································································································.105
5.2.1 硅光電池的基本結(jié)構(gòu) ··················································································.105
5.2.2 硅光電池的工作原理 ··················································································.106
5.2.3 硅光電池的特性參數(shù) ··················································································.106
5.3 硅光電二極管 ····································································································.109
5.3.1 硅光電二極管的基本結(jié)構(gòu) ············································································.109
5.3.2 硅光電二極管的工作原理 ············································································.110
5.3.3 硅光電二極管的電流方程 ············································································.110
5.3.4 硅光電二極管的基本特性 ············································································.111
5.4 硅光電三極管 ····································································································.114
5.4.1 硅光電三極管的基本結(jié)構(gòu) ············································································.114
5.4.2 硅光電三極管的工作原理 ············································································.115
5.4.3 硅光電三極管的基本特性 ············································································.116
5.5 結(jié)型光電器件的偏置電路 ·····················································································.119
5.5.1 反向偏置電路 ···························································································.119
5.5.2 零偏置電路 ······························································································.121
5.5.3 其他光電轉(zhuǎn)換電路 ·····················································································.122
5.6 特殊結(jié)型光電二極管 ···························································································.124
5.6.1 PIN 結(jié)型光電二極管 ··················································································.124
5.6.2 雪崩光電二極管 ························································································.124
5.6.3 半導(dǎo)體色敏探測(cè)器件 ··················································································.126
5.7 象限探測(cè)器件和位置敏感探測(cè)器件 ·········································································.128
5.7.1 象限探測(cè)器件 ···························································································.128
5.7.2 位置敏感探測(cè)器件 ·····················································································.131
5.8 結(jié)型光電器件的特性參數(shù)與選用 ············································································.135
5.8.1 結(jié)型光電器件的特性參數(shù) ············································································.136
5.8.2 結(jié)型光電器件的選用 ··················································································.137
思考與練習(xí) ·············································································································.138
第6 章 光電成像器件 ································································································.140
6.1 真空成像器件 ····································································································.140
6.1.1 像管 ·······································································································.140
6.1.2 攝像管 ····································································································.143
6.2 固體成像器件 ····································································································.145
6.2.1 電荷耦合器件 ···························································································.145
6.2.2 CMOS 圖像傳感器 ····················································································.153
6.2.3 工業(yè)相機(jī)簡(jiǎn)介 ···························································································.158
6.2.4 機(jī)器視覺(jué)系統(tǒng)的組成及應(yīng)用 ·········································································.161
6.3 工業(yè)相機(jī)的應(yīng)用 ·································································································.169
6.3.1 條紋相機(jī) ·································································································.169
6.3.2 立體相機(jī) ·································································································.175
6.3.3 偏振相機(jī) ·································································································.181
6.3.4 光譜相機(jī) ·································································································.184
思考與練習(xí) ·············································································································.186
第7 章 紅外探測(cè)器件 ································································································.188
7.1 紅外探測(cè)器件分類(lèi) ······························································································.188
7.1.1 熱探測(cè)器件 ······························································································.188
7.1.2 光子探測(cè)器件 ···························································································.189
7.1.3 紅外探測(cè)器件的工作條件與性能參數(shù) ·····························································.190
7.2 常用紅外探測(cè)器件 ······························································································.198
7.2.1 光電導(dǎo)紅外探測(cè)器件的工作原理與性能分析 ····················································.198
7.2.2 掃積型紅外探測(cè)器件原理與結(jié)構(gòu) ···································································.201
7.2.3 光伏紅外探測(cè)器件的工作原理與性能分析 ·······················································.203
7.2.4 肖特基勢(shì)壘光電探測(cè)器件的工作原理 ·····························································.205
7.2.5 量子阱紅外光子探測(cè)器件 ············································································.206
7.3 常用熱探測(cè)器件 ·································································································.207
7.3.1 熱敏電阻 ·································································································.208
7.3.2 熱釋電探測(cè)器件 ························································································.211
7.3.3 高萊管 ····································································································.213
7.4 其他紅外探測(cè)器件 ······························································································.214
7.4.1 銻化銦紅外探測(cè)器件 ··················································································.214
7.4.2 碲鎘汞紅外探測(cè)器件 ··················································································.215
7.4.3 碲錫鉛紅外探測(cè)器件 ··················································································.215
7.4.4 砷化鎵紅外探測(cè)器件 ··················································································.216
7.4.5 光子牽引探測(cè)器件 ·····················································································.217
7.4.6 MOS 探測(cè)器件 ·························································································.218
7.5 紅外探測(cè)器件的原理及應(yīng)用 ··················································································.218
7.5.1 紅外夜視儀的原理及應(yīng)用 ············································································.218
7.5.2 紅外熱成像儀的原理及應(yīng)用 ·········································································.220
7.5.3 紅外制導(dǎo)系統(tǒng)的原理及應(yīng)用 ·········································································.221
思考與練習(xí) ·············································································································.221
第8 章 微納光學(xué)探測(cè)器件 ·························································································.222
8.1 光學(xué)微腔型探測(cè)器件 ···························································································.222
8.1.1 法布里-珀羅型微腔 ····················································································.224
8.1.2 回音壁型微腔 ···························································································.226
8.1.3 光子晶體型微腔 ························································································.227
8.1.4 光學(xué)微腔在光學(xué)探測(cè)中的應(yīng)用 ······································································.227
8.1.5 光學(xué)微腔在激光器和傳感器中的應(yīng)用 ·····························································.229
8.2 二維微納光學(xué)探測(cè)器件 ························································································.232
8.2.1 二維肖特基結(jié)型光學(xué)探測(cè)器件 ······································································.232
8.2.2 二維光電二極管 ························································································.234
8.2.3 二維光電三極管 ························································································.236
8.3 表面等離激元微納光學(xué)探測(cè)器件 ············································································.238
8.3.1 表面等離激元光場(chǎng)調(diào)控 ···············································································.238
8.3.2 亞波長(zhǎng)微納結(jié)構(gòu)等離激元器件 ······································································.240
8.3.3 表面等離激元增強(qiáng)型光學(xué)探測(cè)器件 ································································.241
8.3.4 表面等離激元在納米激光器和傳感器中的應(yīng)用 ·················································.243
8.4 柔性微納光學(xué)探測(cè)器件 ························································································.247
8.4.1 基于傳統(tǒng)無(wú)機(jī)半導(dǎo)體材料的柔性微納光學(xué)探測(cè)器件 ···········································.247
8.4.2 基于新型柔性材料的柔性微納光學(xué)探測(cè)器件 ····················································.248
8.4.3 柔性微納光學(xué)探測(cè)器件在仿生方面的應(yīng)用 ·······················································.250
8.4.4 柔性微納光學(xué)探測(cè)器件在傳感和顯示方面的應(yīng)用 ··············································.252
思考與練習(xí) ·············································································································.254
第9 章 典型光電探測(cè)系統(tǒng) ·························································································.255
9.1 瞬態(tài)表面高溫光電探測(cè)系統(tǒng)和校準(zhǔn)系統(tǒng) ···································································.255
9.1.1 瞬態(tài)表面高溫光電探測(cè)系統(tǒng) ·········································································.255
9.1.2 瞬態(tài)表面溫度傳感器可溯源校準(zhǔn)系統(tǒng) ·····························································.265
9.1.3 瞬態(tài)高溫測(cè)量的外推方法 ············································································.274
9.2 激光光幕靶光電探測(cè)系統(tǒng)及校準(zhǔn) ············································································.275
9.2.1 整體框架型激光光幕靶 ···············································································.276
9.2.2 分離型激光光幕靶 ·····················································································.279
9.2.3 激光光幕靶的校準(zhǔn) ·····················································································.286
9.2.4 激光光幕靶的應(yīng)用拓展 ···············································································.287
9.3 原子發(fā)射雙譜線光電測(cè)溫系統(tǒng) ···············································································.290
9.3.1 原子發(fā)射雙譜線光電測(cè)溫原理 ······································································.290
9.3.2 原子發(fā)射雙譜線光電測(cè)溫技術(shù) ······································································.290
9.4 吸收光譜技術(shù) ····································································································.293
9.4.1 紅外吸收光譜檢測(cè)技術(shù) ···············································································.293
9.4.2 可調(diào)諧半導(dǎo)體激光吸收光譜技術(shù) ···································································.296
9.4.3 光聲光譜技術(shù) ···························································································.301
9.5 其他光電探測(cè)系統(tǒng) ······························································································.305
9.5.1 歸一化植被指數(shù)光電探測(cè)系統(tǒng) ······································································.305
9.5.2 光纖傳像元件光學(xué)特性光電探測(cè)系統(tǒng) ·····························································.309
9.5.3 基于位置傳感器的自動(dòng)步槍的自動(dòng)機(jī)運(yùn)動(dòng)參數(shù)光電探測(cè)系統(tǒng) ·······························.312
9.5.4 導(dǎo)彈軌上運(yùn)動(dòng)參數(shù)光電探測(cè)系統(tǒng) ···································································.314
9.5.5 純鎂或鎂合金燃點(diǎn)比色測(cè)溫系統(tǒng) ···································································.315
思考與練習(xí) ·············································································································.317
第10 章 光電探測(cè)新技術(shù)及應(yīng)用 ················································································.319
10.1 激光散斑測(cè)量技術(shù)及應(yīng)用 ···················································································.319
10.1.1 散斑的數(shù)學(xué)描述 ······················································································.320
10.1.2 激光散斑測(cè)量方法 ···················································································.320
10.2 太赫茲技術(shù)及應(yīng)用 ····························································································.323
10.2.1 太赫茲波及特點(diǎn) ······················································································.323
10.2.2 太赫茲波成像技術(shù)的應(yīng)用 ··········································································.325
思考與練習(xí) ·············································································································.331
參考文獻(xiàn) ······················································································································.332